장비 세부 사양서
장비명: Magnetron Sputtering System
* Performance Specifications
- Chamber Ultimate Pressure : Below than 5.0 x 10-7 Torr
- Film Thickness Uniformity : <+/-5% within 4” Wafer
- Sample to Sample Thickness Uniformity : <+/-5%
- Sample Size : Piece to Max 4” Wafer
- System Semiauto Control & Manual Control by PLC Based Touch Control
(10“ Touch Panel)
Auto Pumping and Auto Venting , System Shutdown
- Warranty : 1 Year
1. Main Processing Vacuum Chamber 2 Set
1) Main Process Chamber
① Material : SUS 304L
② Dimension : I.D 420 x 350(H) (설계 시 일부 변경 가능)
③ Top Flange Full Open/Close Type (Pneumatic)
④ Top Flange with Sputter Gun Mount Port (Down Sputter Type) : 3 ea
: Sputter Gun Setting - 2 Sets
⑤ I.D 6" Flange for Substrate Rotator Mount Port : 1 ea
⑥ I.D 6" Flange for Turbo Molecular Pump Mount Port : 1 ea
⑦ I.D 2" * 8" Flange for Loadlock Gate Valve Mount Port : 1 ea
⑧ 다양한 기능 주입구( 펌핑, 배기, 게이지 포트 등)
⑨ 기타 표면처리
2. Vacuum Pumping Unit 2 Set
① Turbo Molecular Pump
- Model : TG450FBAB
- Brand : Osaka Vacuum
- Pumping Capacity : 450 L/sec(N Base)
2
② Main Rotary Pump
- Model : W2V60
- Brand : WSA (Made in Korea)
- Pumping Capacity : 600 L/min
③ Vacuum Pumping Accessories
- I.D 6“ Main Valve (Pneumatic) : 1 ea
- NW25 Angle Valve (Pneumatic) : 3 ea
- NW25 Flexible Metal Hose : 1 Set
- Pumping Line & Solenoid Valve for Rotary Vent : 1 ea
- Diaphragm Valve for Chamber Vent (Pneumatic) : 1 ea
- Electrical Safety Valve for Rotary Venting : 1 ea
- All Electric Safety Alarm & Interlock
3. Vacuum Gauge Control Unit 2 Set
① Full Range Vacuum Gauge (1 Set)
- Model : PKR 251 (NW25)
- Brand : PFEIFFER Vacuum (Made in Germany)
- Reading Range : 7.6 * 10+2 ~ 1.0 * 10-10 Torr
② Low Vacuum Gauge (1 Sets)
- Model : TPR 280 NW16
- Brand : PFEIFFER Vacuum (Made in Germany)
- Reading Range : 760 ~ 1.0 * 10-4 Torr
③ Baratron Gauge Sensor (1 Set)
- Model : CDG025D Series
- Brand : INFICON (Made in Germany)
- Full Range : 0.1 Torr
④ ATM Sensor (1 Set)
- Model : PSE Series
- Brand : SMC (Made in Japan)
- Reading Range : 760 ~ 1.0 * 10-1 Torr
4. Sample Rotation & Substrate Heating Ass'y Unit
1) Sample Rotation Ass’y - 2 Set
① Substrate Holder Size : Piece to Max 4” Wafer
② Rotary Motion Feed-through for Substrate Rotation : 1 ea
③ High Temperature Rotation Bearing & Bearing Housing
④ DC Motor & Motor Controller : 1 Set
(Include the R.P.M Sensor : 1~20 R.P.M)
⑤ Pneumatic Shutter for Sample Screen : 1 Set
⑥ 90 Degrees Rotation Air Cylinder & Solenoid Valve : 1 Set
2) Substrate Heating Ass'y - 1 Set
① Heating Element : SiC Coated Graphite (O.D 4" Element)
② Heat up Temp. : Max 700 ℃
③ Programmable PID Temperature Control & SCR Unit : 1 Set
- Heating Control Transformer
- Voltage & Current Meter
④ K-Type Thermo Couples for Heater PID & Sample Real Temp. : 2 ea
5. Auto Pressure Control Unit 2 Set
① Throttle Valve : 1 Set
- Mount : ISO 160
- Brand : GENIUS (Made in Korea)
10-1 10-3 ② Pressure Control Range : 1.0 * ~ 1.0 * Torr
③ Interface Cable Kit : 1 Set
6. Sputter Cathode & Shutter Unit
1) Sputter Cathode : 4 Sets
①Target Size : O.D 3" (Target은 고객 지급 품목임)
- Thickness : 1/8" to 3/8"
② Material : Cu (OFHC)
③ Magnet : Nd-Fe-B
④ Cooling : Water Cooling Type (Water Groove Type)
2) Individual Shutter Unit : 4 Sets
① CF 1.33" Rotary Motion Feed-through : 1 ea
② Rotation Shaft & Shutter Plate : 1 Set
③ 90 Degrees Rotation Air Cylinder & Solenoid Valve : 1 Set
7. Sputter Power Supply Unit
1) DC Power Supply 2 Set
① DC Power Capacity : 1 KW
- Co-Sputtering Available
② Brand : PungJeon PS(구. PS Plasma, Made in Korea)
③ All Digital Display Type
④ Power On/Off : PLC Remote Control Type
⑤ Power Cable Kit
2) RF Power Supply 2 Set
① Power Capacity : 600 W (Model : YSR-06AF)
- Co-Sputtering Available
② Frequency : 13.56 MHz 1 Set, 12.56 MHz 1 Set,
③ Auto Matching Network : Air Cooled Type
④ Brand : YoungShin (Made in Korea)
⑤ All Digital Display Type
⑥ Power On/Off : PLC Remote Control Type
- Soft Down Control for Target Protecting
⑦ RF Power Cable Kit
8. Process Gas Supply Unit 2 Set
① MFC(Mass Flow Controller) : 1 Set
② Processing Gas : Ar, O2, N2
③ Full Scale : Ar (50sccm), O2 (10 sccm), N2 (50 sccm)
④ MFC Brand : CELERITY (Made in USA)
⑤ Mount : 1/4" LOK Type
⑥ MFC Readout : 3 Channel (PLC Touch Panel Display)
⑦ Shut Off Valve : 1/4" Diaphragm Valve (3 ea)
⑧ Main Chamber Vent Valve : 1 ea
⑨ 1/4" VCR/Swagelok Fitting & Accessories
9. Utility & Electric Control Panel Unit 1 Set
① Main Frame (Fe Frame Ivory Painting)
- Size : 850(W) x 1000(D) x 800(H) (설계 시 일부 변경 가능)
② 19" Standard Control Rack Mountable
- Size : 600(W) x 1100(D) x 1800(H)
- Electric Distribution & Inter Connection Box With Safety Interlock
- Emergency Button On The Front Panel
- Safety Interlock for Electric, Pump, Valves, Utilities
- System Semiauto Control & Manual Control by PLC Based Touch Control (10.5“)
③ Compressed Air(CDA)
- Include the Air Regulator
- Air Pressure Switch for Safety Interlock
④ Water(PCW) Control Unit
- Water Flow-meter for Safety Interlock
10. 고객사 준비사항
System Utility
- Main power : 220V or 380V, 3phase, 60Hz => 협의진행
- Compressed Air Pressure : 5 ~ 7 kg/cm2 , 1/4" Swagelok Type
- Cooling Water Pressure : 3 ~ 6 kg/cm2 , 1/2" Swagelok Type
- Dry Air for Vent Pressure : 2 ~ 3 kg/cm2 , 1/4" Swagelok Type
11. System 이미지 도면 & Layout(예시)
Layout(예시)