[ 물 품 명 세 서 ]

출력일자 : 2026/07/29

PAGE : 1

순번 품 명 및 규 격 단위 수량 부 서 명 담당자 전 화

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1.HermeticallySealedModule(TwoWorkstation):1set

-SinglesidedandDouble(4port)length:2,200(L)X900(H)X

780mm(D).

-Modularstructurewithelastomergasketfrontpanel

-Material:304StainlessSteel,Mainbody:4mmthick

-Sideendpanel:4mmthick,0.3micronfilter:2ea

-LEDSkylight,9”GlovePort(M/C):4ea,ButylRubberGlove(

8”dia.):2pair

-Window:Scratch&Highimpactresistant,Opticallyclear

polycarbonate

-ElectricalOutlet:Twoduplex(220V),GlovePortcover:

Protectatmosphereduringglovereplacement

-Serviceportfeedthru:NW40(2ea),3/8”(1ea),1/4”(1ea)

-HeightAdjustableShelves:4ea

2.Antechamber:1set

-ThischamberwillbeinstalledRightsideofglovebox

-Size:390dia.x600mmlength,Highvacuumdesign,O-ring

sealed,SlidingShelf

-Material:304StainlessSteel

-Vacuumcapacity:1x10-3torr,Doors,verticalaction

-Vacuumgauge:Bourdontubedialtype

-Connection:3/8”Refillsolenoidvalve

3.MiniAntechamber:1set

-ThischamberwillbeinstalledRightsideofglovebox

-150mm(dia.)x290mm(Length),Doors:SinglecenterKnob

Type,O-ring

-Material:304StainlessSteel

-Gauge:Broudontubedialtype,Vacuumcapacity:1x10-3

torr

-Connection:1/4”ManualrefillBallvalve

4.AutomaticPressureController(7”FullColorTouchPanel,

FoldingType):1set

-PressureRange:-12.5to12.5mbar,Limitseasilyadjustable.

-Manualfootswitchoperate.

-Twosolenoidvalvesareoperated.

-1setofDryScrollVacuumPump.IntakeType:NW25.Ultimate

pressure:5x10-4torr

-TwoStage,Power220V,1Phase

1 5.PurificationSystem:1set SE 1첨단양자소재연구실 손원혁 042-866-6513

-Automaticatmospherereductioncontrolfor1ppm

atmosphere

-Oxygen/Moistureremovaltolessthan1ppm,Control:PLC

type(Heat,Vacuum,Purge,Refill:13hours)

-PneumaticvalveforRegeneration,CirculationBlower:63CFM

(VariableSpeedControl)

-Purifier:1set(DoubleColumnPurifier),PurifierCharger

Capacity(Molecularsieve&CopperOxide)

6.SupportStand

-2,200(L)x936(H)x780(D)mm

-Material:SS400(Steel),Painting:C9010MRWHITE,Caster

7.MoistureAnalyzer:1set

-Measurementrange:0~1,000ppm

-Accuracy:±2℃

-Repeatability+/-0.5℃

-OperatingTemperature:-40to+60℃

8.OxygenAnalyzer:1set

-Measurementsystem:ZirconiaOxygenconcentrationcell

-Measurementrange:0.001ppm？100%

-Displayrange:0-1,000ppm.

-Repeatability:±0.5%FSorless0-1%rangeormore±1.0%FS

or±0.1ppm

whicheverisbiggerorlessthan0-1%range

-Measurementgasconditions:Temperature100℃orless

Pressure:lessthan0.1MPa(relativepressure)

Vacuum:Atmosphericpressure？10-3Pa(absolutepressure)

Humidity:Dewpointisambienttemperatureorless

-Compliantstandard:CEmarkingandRoHS

9.SolventTrap(ChemicalType):1set

-Thistrapwillbeinstalledinsidesupportstandofglovebox

-Specialdesignplumbing&Chemicalfilter

-Pneumaticisolationvalvesandbypassvalve&NW40clamping

-AutomaticPLCtyperegenerationprocess

10.Susflexible:1ea

-4m

11.SpecialFeedthru(NWtype):1pkg.

-LeakFreeType.

2026-4333

[ 물 품 명 세 서 ]

출력일자 : 2026/07/29

PAGE : 2

순번 품 명 및 규 격 단위 수량 부 서 명 담당자 전 화

-NW50Flange:2ea.

-NW40Flange:9ea.

-Theseportswillbeinstalledatbackpanel.

12.SpecialFeedthru(BNCType):1pkg.

-LeakFreeType.

-BNCType:4ea.

-Position:TBD.

13.BoxPugingSystem:1set

-ElectricValvewithManualValve.

-ControledbyPLC.

-PurgingTimeProgrammable:0to999min.

14.HeatExchanger/Fan(Overhead):1set

-Overheadmounted

-GloveBoxRoomTempControl:20℃Under

-CoolingCoil&Blow

2026-4333